MEMS fabrication process| steps, PVD, CVD, types| animation
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MEMS fabrication process| steps, PVD, CVD, types| animation
Note : In 9:56 it says etching is done by chemical solution(wet etching), please note that it is not the only method. "Dry etching," which involves ion bombardment, is also widely used. MEMS fabrication technique, Physical Vapour Deposition(PVD), Evaporation and Sputtering technique, Chemical Vapour Deposition(CVD), steps, Etching, Stripping # ...
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